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    ʻO kēia hoʻolālā a me ke kaʻina hana o ka sensor kaomi ʻo ia ka hoʻohana pono ʻana o ka ʻenehana MEMS (ka pōkole o microelectromechanicalsystems, ʻo ia hoʻi, micro-electromechanical system).

    ʻO MEMS kahi ʻenehana palena 21st century e pili ana i ka micro/nanotechnology, hiki iā ia ke hoʻolālā, hana, hana a hoʻokele i nā mea micro/nano. Hiki iā ia ke hoʻohui i nā ʻāpana mechanical, nā ʻōnaehana optical, nā ʻāpana hoʻokele, nā ʻōnaehana hoʻokele uila a me nā ʻōnaehana hana kikohoʻe i loko o kahi micro-system ma ke ʻano holoʻokoʻa. ʻAʻole hiki i kēia MEMS ke hōʻiliʻili, hana a hoʻouna i ka ʻike a i ʻole nā ​​ʻōlelo aʻoaʻo, akā hana pū kekahi i nā hana autonomously a i ʻole e like me nā ʻōlelo a waho e like me ka ʻike i loaʻa. Hoʻohana ia i ke kaʻina hana hana e hui pū ana i ka ʻenehana microelectronics a me ka ʻenehana micromachining (me ka micromachining silicon, ka micromachining surface silicon, LIGA a me ka wafer bonding, etc.) e hana i nā ʻano ʻike like ʻole, actuators, nā mea hoʻokele a me nā microsystems me ka hana maikaʻi loa a me ke kumu kūʻai haʻahaʻa. Hoʻomaopopo ka MEMS i ka hoʻohana ʻana i ka ʻenehana holomua e ʻike i nā micro-systems a hōʻike i ka hiki o nā ʻōnaehana hoʻohui.

     

    ʻO ka sensor kaomi he mea maʻamau o ka ʻenehana MEMS, a ʻo kekahi ʻenehana MEMS i hoʻohana pinepine ʻia ʻo ia ka MEMS gyroscope. I kēia manawa, he nui nā mea hoʻolako pūnaewele EMS nui, e like me BOSCH, DENSO, CONTI a pēlā aku, ua loaʻa iā lākou nā pahu i hoʻolaʻa ʻia me nā hale like. Nā pōmaikaʻi: ka hoʻohui kiʻekiʻe, ka liʻiliʻi liʻiliʻi liʻiliʻi, ka liʻiliʻi o ka mea hoʻohui pūnaewele me ka liʻiliʻi liʻiliʻi, maʻalahi e hoʻonohonoho a hoʻokomo. ʻO ka puʻupuʻu kaomi i loko o ka sensor ua hoʻopili piha ʻia i loko o ka silica gel, nona nā hana o ka corrosion resistance a me ka vibration resistance, a hoʻomaikaʻi nui i ke ola lawelawe o ka sensor. He haʻahaʻa ke kumu kūʻai, hua kiʻekiʻe a me ka hana maikaʻi loa.

     

     

    Eia kekahi, hoʻohana kekahi mau mea hana o nā mea ʻike puʻu intake i nā ʻāpana kaomi maʻamau, a laila hoʻohui i nā ʻāpana peripheral e like me nā puʻupuʻu kaomi, nā ʻāpana pale EMC a me nā pin PIN o nā mea hoʻohui ma o nā papa PCR. E like me ka mea i hōʻike ʻia ma ka Figure 3, ua hoʻokomo ʻia nā pahu kaomi ma ke kua o ka papa PCB, a ʻo ka PCB he papa PCB ʻaoʻao ʻelua.

     

    He haʻahaʻa ka hoʻohui ʻana a me ke kumu kūʻai waiwai kiʻekiʻe o kēia ʻano ʻenekona kaomi. ʻAʻohe pūʻolo i hoʻopaʻa ʻia ma ka PCB, a ua hoʻohui ʻia nā ʻāpana ma ka PCB e ke kaʻina hana kuʻuna, e alakaʻi ana i ka pilikia o ka soldering virtual. I loko o ke kaiapuni o ka haʻalulu kiʻekiʻe, ka wela kiʻekiʻe a me ka haʻahaʻa kiʻekiʻe, pono e pale ʻia ka PCB, nona ka pilikia kiʻekiʻe.

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