Hoʻolālā o Piezoresistive Sensor

I loko o kēia mea ʻike, ua hoʻohui ʻia ka mea pale pale ma ka monocrystalline silicon diaphragm e ke kaʻina hana hoʻohui e hana ai i kahi chip piezoresistive silicon, a ua paʻa paʻa ka ʻaoʻao o kēia chip i ka pūpū, a alakaʻi ʻia nā alakaʻi electrode. Piezoresistive pressure sensor, i ʻike ʻia he solid-state pressure sensor, ʻokoʻa ia mai ka adhesive strain gauge, pono e ʻike i ka ikaika o waho ma o nā mea elastic sensitive, akā manaʻo pololei i ke ana ʻana ma o ka diaphragm silicon.

ʻO kekahi ʻaoʻao o ka diaphragm silicon he lua kaomi kiʻekiʻe e kamaʻilio me ke kaomi i ana ʻia, a ʻo kekahi ʻaoʻao he lua haʻahaʻa haʻahaʻa e kamaʻilio me ka lewa. ʻO ka mea maʻamau, ua hoʻolālā ʻia ka diaphragm silicon ma ke ʻano he pōʻai me ka ʻaoʻao paʻa, a ʻo ka ratio o ke anawaena a me ka mānoanoa e pili ana i 20 ~ 60. ʻEhā P impurity resistance strips i hoʻolaha ʻia ma ka ʻāina ma ka diaphragm circular silicon a hoʻopili ʻia i kahi alahaka piha, ʻelua o ia mau mea. aia i loko o ka ʻāpana koʻikoʻi koʻikoʻi a ʻo nā mea ʻelua ʻē aʻe i loko o ka ʻāpana koʻikoʻi tensile, ʻo ia ka symmetrical e pili ana i ke kikowaena o ka diaphragm.

Eia kekahi, aia pū kekahi diaphragm silicon square a me ka sensor kolamu silika. Hana ʻia ka mea ʻike kilikakika me nā ʻāpana kū'ē ma o ka hoʻopuehu ʻana i kekahi ʻaoʻao o kahi mokulele aniani o ka cylinder silika, a ʻelua mau paʻi kūʻē i ke koʻikoʻi a me ʻelua mau ʻāpana kūʻokoʻa koʻikoʻi e hana i kahi alahaka piha.

ʻO ka sensor Piezoresistive kahi mea i hana ʻia e ka diffusion resistance ma ka substrate o nā mea semiconductor e like me ka hopena piezoresistive o nā mea semiconductor. Hiki ke hoʻohana pololei ʻia kona substrate e like me ke ana ʻana, a pili ka diffusion resistance i ka substrate ma ke ʻano o kahi alahaka.

Ke hoʻoheheʻe ʻia ka substrate e ka ikaika o waho, e hoʻololi nā koina kūʻē a e hoʻopuka ke alahaka i nā mea like ʻole. ʻO nā substrates (a i ʻole diaphragms) i hoʻohana ʻia ma ke ʻano he piezoresistive sensor ka nui o nā wafer silika a me nā wafer germanium. ʻO nā mea ʻike piezoresistive silikoni i hana ʻia me nā wafer silika ma ke ʻano he mea maʻalahi ka mea i ʻoi aku ka nui o ka nānā ʻana, ʻoi aku ka nui o nā sensor piezoresistive solid-state no ke ana ʻana i ke kaomi a me ka wikiwiki.