He kūpono no Hitachi KM11 ʻaila kaomi ʻaila EX200-2-3-5

ʻEhā mau ʻenehana kaomi o ka mīkini paʻi

1. Kahiko

Hoʻohana pinepine ʻia nā sensor capacitive pressure e ka nui o nā noi ʻoihana OEM. ʻO ka ʻike ʻana i nā loli capacitance ma waena o nā papa ʻelua e hiki ai i kēia mau mea ʻike ke ʻike i ka haʻahaʻa haʻahaʻa haʻahaʻa a me nā pae vacuum. I kā mākou hoʻonohonoho sensor maʻamau, ʻo kahi hale paʻa i ʻelua mau ʻāpana metala i hoʻokaʻawale ʻia, kūlike a me ka uila, ʻo kekahi o ia mea he diaphragm hiki ke kūlou iki ma lalo o ke kaomi. Hoʻopili ʻia kēia mau wahi paʻa paʻa (a i ʻole nā ​​​​palapala) i mea e hoʻololi ai ka piko o ka hui i ke āpau ma waena o lākou (e hana maoli ana i ka capacitor variable). ʻIke ʻia ka hopena o ka hoʻololi e kahi kaapuni hoʻohālikelike laina koʻikoʻi me (a i ʻole ASIC), e hoʻonui a hoʻopuka i kahi hōʻailona kiʻekiʻe kiʻekiʻe.

2. ʻAno CVD

ʻO ka hoʻoheheʻe ʻana i ka mahu (a i ʻole "CVD") ke ʻano hana e hoʻopaʻa ai i ka papa polysilicon i ka diaphragm kila kila ma ka pae mole, no laila e hana ai i ka sensor me ka hana drift lōʻihi loa. Hoʻohana ʻia nā ʻano hana hana semiconductor maʻamau e hana i nā alahaka polysilicon strain gauge me ka hana maikaʻi loa ma ke kumukūʻai kūpono loa. Loaʻa i ka hoʻolālā CVD ka hana kumukūʻai maikaʻi loa a ʻo ia ka sensor kaulana loa i nā noi OEM.

3. Sputtering ʻano kiʻiʻoniʻoni

Hiki i ka hoʻopaʻa ʻia ʻana o ke kiʻiʻoniʻoni (a i ʻole "kiʻiʻoniʻoni") ke hana i kahi mea ʻike me ka nui o ka linearity hui pū ʻia, hysteresis a me ka hana hou. Hiki ke kiʻekiʻe ka pololei e like me 0.08% o ka pālākiō piha, ʻoiai ka haʻahaʻa o ka drift lōʻihi e like me ka 0.06% o ka unahi piha i kēlā me kēia makahiki. ʻO ka hana kupaianaha o nā mea hana kī-ʻo kā mākou mea ʻike kiʻi ʻoniʻoni ʻoniʻoni he waiwai i ka ʻoihana ʻike kaomi.

4.MMS ʻano

Hoʻohana kēia mau mea ʻike i ka diaphragm micro-machined silicon (MMS) e ʻike i nā loli kaomi. Hoʻokaʻawale ʻia ka diaphragm silicon mai ke kikowaena e ka 316SS piha i ka aila, a hana lākou i ka moʻo me ke kaʻina hana. Hoʻohana ʻo MMS sensor i ka ʻenehana hana semiconductor maʻamau, hiki ke hoʻokō i ke kūpaʻa uila kiʻekiʻe, linearity maikaʻi, ka hana haʻalulu wela maikaʻi a me ka paʻa i loko o kahi pūʻolo sensor compact.