E pili ana i ka wahie Passat wahie kaomi maʻamau 06E906051K

1. He ʻano hana no ka hana ʻana i kahi mea ʻike kaomi, ʻo ia hoʻi:

Hāʻawi i kahi pani semiconductor, kahi i hoʻokumu ʻia ai kahi papa dielectric interlayer mua, kahi papa dielectric interlayer mua a me kahi papa dielectric interlayer lua ma ka substrate semiconductor.

ʻO kahi pā electrode haʻahaʻa i ka papa dielectric interlayer mua, kahi electrode mua i loaʻa ma ka papa like me ka pā electrode haʻahaʻa a hoʻokaʻawale ʻia.

Nā papa hoʻohui;

Ka hana ʻana i kahi ʻāpana mōhai ma luna o ka pā polar lalo;

Hoʻokumu i kahi pā electrode luna ma luna o ka papa dielectric interlayer mua, ka papa interconnection mua a me ka papa mōhai;

Ma hope o ka hana ʻana i ka ʻāpana mōhai a ma mua o ka hoʻokumu ʻana i ka pā luna, i ka papa interconnection mua

Hoʻokumu i kahi awāwa pili, a hoʻopiha i ka ʻāpana pili me ka pā luna e hoʻopili uila me ka papa interconnection mua; A i ʻole,

Ma hope o ka hoʻokumu ʻana i ka pā electrode luna, ua hoʻokumu ʻia nā grooves hoʻohui i ka pā electrode luna a me ka papa interconnection mua, kahi

Ka hana ʻana i kahi papa conductive e hoʻopili ana i ka pā electrode luna a me ka papa interconnection mua ma ke awāwa pili;

Ma hope o ka hoʻopili uila ʻana i ka pā luna a me ka papa interconnection mua, e hoʻoneʻe i ka ʻāpana mōhai e hana i kahi lua.

2. ʻO ke ala no ka hoʻokumu ʻana i kahi sensor kaomi e like me ke koi 1, kahi i ka papa mua

ʻO ke ala no ka hoʻokumu ʻana i ka ʻāpana ʻālana ma ka papa dielectric interlayer e loaʻa i kēia mau ʻanuʻu:

Ka waiho ʻana i kahi ʻāpana mea mōhai ma ka papa dielectric interlayer mua;

Ke hoʻohālike ʻana i ka papa mea ʻālana e hana i kahi ʻāpana mōhai.

3. ʻO ke ala no ka hoʻokumu ʻana i ka sensor kaomi e like me ke koi 2, kahi e hoʻohana ʻia ai ka photolithography a me ke kahakaha ʻana.

Hoʻohālikelike ʻia ka papa mea ʻālana e ke kaʻina etching.

4. ʻO ke ala no ka hoʻokumu ʻana i kahi sensor kaomi e like me ke koi 3, kahi o ka ʻāpana ʻālana

ʻO ke kalapona amorphous a i ʻole germanium ka mea.

5. ʻO ke ala no ka hoʻokumu ʻana i kahi sensor kaomi e like me ke koi 4, kahi o ka ʻāpana ʻālana

He kalapona amorphous ka mea;

ʻO nā kinoea etching i hoʻohana ʻia i ke kaʻina hana o ke kālai ʻana i ka ʻāpana mea ʻālana ʻo O2, CO, N2 a me Ar;

ʻO nā ʻāpana i ke kaʻina hana o ka etching i ka ʻāpana mea kaumaha: ʻo ke kahe kahe o O2 he 18 SCCM ~ 22 SCCM, a ʻo ka kahe kahe o CO he 10%.

ʻO ke kahe kahe mai ka 90 SCCM a hiki i ka 110 SCCM, ke kahe kahe o N2 mai 90 SCCM a hiki i ka 110 SCCM, a me ke kahe o Ar.

ʻO ka laulā he 90 SCCM ~ 110 SCCM, ʻo ka pae kaomi ʻo 90 mtor ~ 110 mtor, a ʻo ka mana bias

540w~660w.