Hoʻohana ʻia ka mea ʻenekona kaomi semiconductor maʻamau i ka wafer silika N-type ma ke ʻano he substrate.ʻO ka mea mua, ua hana ʻia ka wafer silika i kahi ʻāpana e hoʻoluhi koʻikoʻi me kahi geometry.Ma ka ʻāpana kaumaha o ka wafer silika, hana ʻia ʻehā mau pale diffusion P-type ma nā ʻaoʻao aniani like ʻole, a laila hoʻokumu ʻia kahi alahaka Wheatstone ʻehā me kēia mau pale pale ʻehā.Ma lalo o ka hana o ka ikaika o waho, lilo nā loli o nā waiwai kū'ē i mau hōʻailona uila.ʻO kēia alahaka wheatstone me ka hopena kaomi ʻo ia ka puʻuwai o ka sensor kaomi, ka mea maʻamau i kapa ʻia he alahaka piezoresistive (e like me ka mea i hōʻike ʻia ma ka Figure 1).ʻO nā hiʻohiʻona o ke alahaka piezoresistive penei: ① ua like nā koina kū'ē o nā lima ʻehā o ke alahaka (r0 a pau);② ʻO ka hopena piezoresistive o nā lima pili o ke alahaka ua like ka waiwai a kū'ē i ka hōʻailona;③ Ua like ka heluna wela kū'ē o nā lima ʻehā o ke alahaka, a aia lākou i ka mahana like.Ma ka fig.1, R0 ka waiwai kū'ē me ke koʻikoʻi ʻole ma ka lumi wela;ʻO RT ka hoʻololi i hana ʻia e ka coefficient wela o ke kū'ē (α) ke hoʻololi ka mahana;ʻO Υ Rδ ka hoʻololi ʻana o ke kūpaʻa i hoʻokumu ʻia e ke kānana (ε);ʻO ka volta hoʻopuka o ke alahaka ʻo u=I0 Δ Rδ=I0RGδ (alahaka kumu kūmau o kēia manawa).

ʻO ka I0 ke kumu mau o kēia manawa a ʻo ka e ʻo ia ka puʻupuʻu uila mau.Hoʻohālikelike pololei ka volta pukana o ke alahaka piezoresistive i ke kānana (ε) a ʻaʻohe mea pili i ka RT i hoʻokumu ʻia e ka coefficient wela o ke kūpaʻa, e hoʻemi nui ana i ka neʻe ʻana o ka wela o ka sensor.ʻO ka sensor kaomi semiconductor i hoʻohana nui ʻia he sensor no ka ʻike ʻana i ke kaomi wai.ʻO kāna hana nui he capsule i hana ʻia me ka silicon monocrystalline (e like me ka hōʻike ʻana ma ke Kiʻi 2).Hana ʻia ka diaphragm i kīʻaha, a ʻo ka lalo o ke kīʻaha ka ʻāpana e lawe ai i ka ikaika o waho, a ua hana ʻia ke alahaka kaomi ma lalo o ke kīʻaha.Hana ʻia ke apo lima me ka silicon hoʻokahi mea aniani, a laila hoʻopaʻa ʻia ka diaphragm i ka pedestal.Loaʻa i kēia ʻano sensor kaomi ka maikaʻi o ka naʻau kiʻekiʻe, ka leo liʻiliʻi a me ka paʻa, a ua hoʻohana nui ʻia i ka mokulele, ka hoʻokele lewa, nā mea hana automation a me nā mea lapaʻau.